Performance: Primary beam- Ga ion gun, current 3 nA, with energy 6 to 9 KeV, Surface scanning with spatial resolution of 10 µm, Sensitivity- > 5x 103 cps/nA, Expected emitter life time > 200 emissions µA/ hours
Applications: The MiniSIMS is designed to allow chemical analysis of
surfaces at nanometer level, fast chemical imaging and thin film depth
profiling in one instrument. It can be used for both conducting and
non-conducting samples. An electron gun is used for charge neutralization of
non-conducting samples .
Charges: As applicable